LIBS Info: Element Analysis

Author: Robert W. Standley
SunEdison Semiconductor Ltd., St. Peters, MO, United StatesN/A
Title Authors Material Detector/Spectrometer/Software Source
Detection of interstitial oxygen contents in Czochralski grown silicon crystals using internal calibration in laser-induced breakdown spectroscopy (LIBS) Dibyendu Mukherjee, Robert W. Standley, Patrick A. Taylor, Seyyed Ali Davari Silicon Andor ICCD/Andor Shamrock 500i/ Link

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