LIBS Info: Element Analysis

Title Authors Material Detector Spectrometer Software
Application of laser-induced breakdown spectroscopy to the analysis of the composition of thin films by pulsed laser deposition C. Aragon, V. Madurga, J.A. Aguilera Fe-Ni Films Acton Spectra Pro Acton Spectra Pro
Laser: Nd:YAG
Gate Delay: 3.000us
Gate Width: 50.000us
Measurements are made on thin films produced by Pulsed Laser Deposition. From these measurements the homogeneity of the film is readily determined. The thin films showed significantly higher LIBS intensity (16x) than measurements on bulk samples with similar chemistry. This is also apparent from the calibration curves, which are linear for the bulk analysis, but strongly self-absorbed for the thin film analysis.
Element Detection Limit (ppm) Wavelength (nm) Other Wavelengths (nm) Calibration Method Calibration Range (ppm) Notes
Fe 300.0000 (Stated) 375.8200 517.16 Univariate Calibration -10.0000--10.0000 Calibration using the 375.82nm showed significantly higher signal, but also greater non-linearity in the analysis. 5% RSD for the analysis of Fe in the thin films (cf. 7% in the bulk samples of similar chemistry).

Element RMSE (ppm) Wavelength (nm) Calibration Method Notes