LIBS Info: Element Analysis
Title | Authors | Material | Detector | Spectrometer | Software |
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Application of laser-induced breakdown spectroscopy to the analysis of the composition of thin films by pulsed laser deposition | C. Aragon, V. Madurga, J.A. Aguilera | Fe-Ni Films | Acton Spectra Pro | Acton Spectra Pro | |
Laser: | Nd:YAG 1064.0000nm 100.0000mJ 20.000Hz |
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Gate Delay: | 3.000us | ||||
Gate Width: | 50.000us | ||||
Measurements are made on thin films produced by Pulsed Laser Deposition. From these measurements the homogeneity of the film is readily determined. The thin films showed significantly higher LIBS intensity (16x) than measurements on bulk samples with similar chemistry. This is also apparent from the calibration curves, which are linear for the bulk analysis, but strongly self-absorbed for the thin film analysis. |
Element | Detection Limit (ppm) | Wavelength (nm) | Other Wavelengths (nm) | Calibration Method | Calibration Range (ppm) | Notes |
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Fe | 300.0000 (Stated) | 375.8200 | 517.16 | Univariate Calibration | -10.0000--10.0000 | Calibration using the 375.82nm showed significantly higher signal, but also greater non-linearity in the analysis. 5% RSD for the analysis of Fe in the thin films (cf. 7% in the bulk samples of similar chemistry). |
Element | RMSE (ppm) | Wavelength (nm) | Calibration Method | Notes |
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