LIBS Info: Element Analysis

Title	Authors	Material	Detector	Spectrometer	Software
Investigation of optimized experimental parameters including laser wavelength for boron measurement in photovoltaic grade silicon using laser-induced breakdown spectroscopy	S. Darwiche, M. Benmansour, N. Eliezer, D. Morvan	Silicon	Acton Spectra Pro	Acton Spectra Pro	AnaLIBS
Laser:	Nd:YAG 1064.0000nm 95.0000mJ 20.000Hz
Gate Delay:	1.000us
Gate Width:	7.000us
The authors investigate the effect of a range of parameters (laser wavelength, atmosphere [air/argon/helium], delay) to determine the conditions that give the lowest detection limit for Boron in Silicon. Best results were obtained using the IR laser in Helium

LOD
RMSEP

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Element	Detection Limit (ppm)	Wavelength (nm)	Other Wavelengths (nm)	Calibration Method	Calibration Range (ppm)	Notes
B	0.5360 (Calibration Curve Slope)	249.7000	N/A	Univariate Calibration	1.0000-100.0000	266nm laser in Helium atmosphere
B	0.0610 (Calibration Curve Slope)	249.7000	N/A	Univariate Calibration	1.0000-100.0000	Helium atmosphere
B	0.3550 (Calibration Curve Slope)	249.7000	N/A	Univariate Calibration	1.0000-100.0000	266nm laser in Argon atmosphere
B	0.6790 (Calibration Curve Slope)	249.7000	N/A	Univariate Calibration	1.0000-100.0000	266nm laser in Air atmosphere

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Element	RMSE (ppm)	Wavelength (nm)	Calibration Method	Notes
No data available in table

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