LIBS Info: Element Analysis
| Title | Authors | Material | Detector | Spectrometer | Software |
|---|---|---|---|---|---|
| Investigation of optimized experimental parameters including laser wavelength for boron measurement in photovoltaic grade silicon using laser-induced breakdown spectroscopy | S. Darwiche, M. Benmansour, N. Eliezer, D. Morvan | Silicon | Acton Spectra Pro | Acton Spectra Pro | AnaLIBS |
| Laser: | Nd:YAG 1064.0000nm 95.0000mJ 20.000Hz |
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| Gate Delay: | 1.000us | ||||
| Gate Width: | 7.000us | ||||
| The authors investigate the effect of a range of parameters (laser wavelength, atmosphere [air/argon/helium], delay) to determine the conditions that give the lowest detection limit for Boron in Silicon. Best results were obtained using the IR laser in Helium | |||||
| Element | Detection Limit (ppm) | Wavelength (nm) | Other Wavelengths (nm) | Calibration Method | Calibration Range (ppm) | Notes |
|---|---|---|---|---|---|---|
| B | 0.5360 (Calibration Curve Slope) | 249.7000 | N/A | Univariate Calibration | 1.0000-100.0000 | 266nm laser in Helium atmosphere |
| B | 0.0610 (Calibration Curve Slope) | 249.7000 | N/A | Univariate Calibration | 1.0000-100.0000 | Helium atmosphere |
| B | 0.3550 (Calibration Curve Slope) | 249.7000 | N/A | Univariate Calibration | 1.0000-100.0000 | 266nm laser in Argon atmosphere |
| B | 0.6790 (Calibration Curve Slope) | 249.7000 | N/A | Univariate Calibration | 1.0000-100.0000 | 266nm laser in Air atmosphere |
| Element | RMSE (ppm) | Wavelength (nm) | Calibration Method | Notes |
|---|